Veeco Dimension 3100, Manual

Page: 350 / 376

Calibration
Fine-tuning for X-Y Calibration
330 Dimension 3100 Manual Rev. D
4. Return to the Scanner Calibration dialog box.
5. Select the X fast derate or Y slow derate parameter.
6. Enter the new X fast derate or Y slow derate value calculated in Step 3 . This adjusts the
scanner’s fast axis to more closely match calculated distances with actual feature distances.
7. To set the new parameter value, click
OK
.
17.7.5 Measure Vertically at 150V Scan Size
1. Select two widely-spaced features on the sample image of known separation.
2. Use the mouse to draw a vertical line between them.
Note: For example, on a 10µm, silicon reference, draw the line from the top edge of
one pit to the top edge of another pit as far away as possible. The microscope
displays the measured distance next to the line.
3. Verify that the microscope’s measured distance agrees with the known vertical distance. If
there is significant disagreement between the two, execute the fine tuning procedure; go to
the next step. If the displayed distance agrees with the known distance, no further calibration
is required.
4. Adjust the Yslow derate value by using one of two methods: 1) the Trial and Error Method
or 2) the Calculation Method described in Measure Horizontally at 150 V Scan Size:
Section 17.7.4 above.
17.7.6 Change Scan angle and Repeat Calibration Routines
• Change the Scan angle on the Scan Controls panel to 90 º.
• Repeat steps above for the following parameters: Y fast sens , X slow sens , Y fast der ,
and X slow der to ensure the scanner is calibrated properly along the X- and Y-axis for
scanning at 90º.