GB 02876 - Edition 04 - Oct 13
1/1
B 40
Inert gas purge connection
(N
2
connection)
Nitrogen
characteristics
For maximum performances, a filtered dry nitrogen supply with the
following characteristics is required:
Condensation point < 22 °C
Dust < 1 μm
Oil < 0.1 ppm
Min. supply pressure: 15 PSIG (200 kPa absolute)
Max. supply pressure: 87 PSIG (700 kPa absolute)
Flowrate
A 40
Concentration
Fab 200
Fab 300
H
2
O
10 ppb
0,08 ppb
O
2
5 ppb
0,01 ppb
Connection
Connect the N
2
pipe on the
N
2
connector
.
Rear panel
N
2
IN
N
2
pressure regulator
Swagelok for tube 6.35 mm
Stainless steel smooth pipe
external diameter 6.35 mm
Customer supply
Manufacturer supply
N
2
flowrate
adjustment
Nitrogen needs to be used to reduce the concentration of pyrophoric
material below the Lower Explosive Limit.
The N
2
flow rate can be adjusted with the
pressure regulator
according to the process.
The N
2
flow level is read on the hand held display module.
A sudden inrush of N
2
into the pressurization circuit may result in damage
to internal parts.
Close the pressure regulator by turning the knob counter-clockwise
before pressurizing the circuit.
adixen Vacuum Products - Operating instructions - A3P Series
