PRECESSION ELEPHANT 2 Scan Head 2
12 Disposal
13.1 General specification ..................................................................................... 84
13.2 Cameras ............................................................................................................ 85
13.3 Dimensions, possibilities for mounting and weight .................................. 85
13.4 Power supply ................................................................................................. 86
13.5 Cooling water ........................................................................................ 86
13.6 Gasses and particle extraction ...................................................................... 86
13.7 Environmental conditions .............................................................................. 88
13.8 Options .......................................................................................................... 89
13.9 Typical process parameters .......................................................................... 89
13.10 Electrical and electronical interfaces ............................................................. 90
13.10.1 XY4-100 - SLAVE LINK ......................................................................... 90
13.10.2 DATA I/O ............................................................................................... 92
13.10.3 SERVICE .............................................................................................. 97
13.10.4 DC INPUT ............................................................................................. 98
13.10.5 SYNC .................................................................................................... 99
13.10.6 BEAM SWITCH ................................................................................... 100
13.10.7 USB 1, USB 2, USB 3 ......................................................................... 101
13.10.8 ETHERNET ......................................................................................... 101
14 Bibliography
5