PRECESSION ELEPHANT 2 Scan Head 2
General specification
Theoretical Z positioning resolution 30 nm
Aperture
26
mm
Precession frequency
200 to 600 Hz (12.000 to 36.000 rpm),
depending on incidence angle
Maximum precession angle (full
cone angle)
18°
Field size
0.8 to 3.0 mm, depending on nozzle
Hole diameter accuracy
< 0.2 µm
Step width adjustment of hole
diameter
0.015 µm
13.2 Cameras
Table 13: Cameras
Cameras
Vision-camera
1280 × 1024 pixel, pixel size 4.65 µm
Adjustment-cameras
1280 × 1024 pixel, pixel size 5.2 µm
13.3 Dimensions, possibilities for mounting and weight
Table 14: Dimensions, possibilities for mounting and weight
Dimensions, possibilities for mounting and weight
Dimensions
Please find the scan head dimensions in
the respective engineering drawing. This
engineering drawing can be obtained on
request from our engineering and design
division.
Possibilities for mounting
Weight
20.5 kg
85