PRECESSION ELEPHANT 2 Scan Head 2
Purge gas for the objective (focusing optics unit)
Specifics
Internal restrictor limits pressure to
1 bar (100 kPa)
Table 18: Purge gas for the scan head
Purge gas for the scan head
Quality
pressurized air (2:4:0 according to
ISO 8573-1:2010) or nitrogen gas
(N
2
4.0, oil- and particle-free)
Inlet pressure
max. 50 mbar (5 kPa)
Volume flow
typ. 2 l/min
Recommend tubing material
polyetherurethane; D 4 mm, d 2.5 mm
(or D 4 mm, d 2 mm)
Specifics
Internal restrictor limits pressure to
1 bar (100 kPa)
Internal pressure relief valve opens at
140 ± 50 mbar (14 ± 5 kPa)
Table 19: Process gas
Process gas
Quality
non-corrosive gases used commonly as
process gases
Inlet pressure
depending on nozzle up to 4 bar (400 kPa)
Recommend tubing material
polyetherurethane; D 6 mm, d 4 mm
Table 20: Suction cup for particle extraction
Suction cup for particle extraction
Recommend tubing material
polyetherurethane; D 10 mm
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