PARTS LIST
6-4
CommandTHC for X-Y Table
Instruction Manual
11
Plasma interface assembly
Index no.
Part no.
Description
Quantity
1
128494
Plasma interface assembly
1
2
128408
PC Board Assembly, plasma interface
1
3
041842
HPR PC Board Assembly, plasma interface
1
THC.94 for HPR
Figure 6-3 Plasma interface assembly
HT4400 and HPR installation
Note:
Instructions to install the plasma interface PCB into the HT4400 power supply are included in
section 3h.
Instructions to install the plasma interface PCB into the HPR power supply are included in
section 3i.
The plasma interface enclosure is not used for the HT4400.
1
2
3