SETUP
3-20
CommandTHC for X-Y Table
Instruction Manual
7
Grounding requirements
To ensure personal safety and proper operation, and to reduce electromagnetic interference (EMI), the THC system
must be properly grounded.
Power cord grounding
The THC control module must be properly grounded through the power cord according to national or local electrical
codes.
Protective earth ground
• Install protective earth (PE) grounding cables to the 3 THC components as shown in Figure 3-13. Grounding
must comply with national or local electrical requirements.
• The PE cables must be supplied by the customer.
Figure 3-13 THC component PE grounding
THC control module
Plasma interface
assembly *
* HT4400: See note on page 3-12.
