SETUP
3-4
CommandTHC for X-Y Table
Instruction Manual
9
Plasma interface assembly
Figure 3-2 Plasma interface assembly mounting
THC.99
0.25"
(6 mm)
7.0"
(178 mm)
4.6"
(117 mm)
9.5"
(241 mm)
1.25"
(32 mm)
HT4400 and HPR installation
Note:
Instructions to install the plasma interface PCB into the HT4400 power supply are included in
section 3h.
Instructions to install the plasma interface PCB into the HPR power supply are included in section
3i.
The plasma interface enclosure is not used for the HT4400.
•
Mount the plasma interface assembly close to the plasma power supply for easy connection of control and
process signal wires between the units. The unit can be mounted in any position. The mounting holes require
#8 (4 mm) fasteners. See Figure 3-2.
