07/2020
Corona II
– LED Line Scan Illumination
PMA_CHR_CD40069_R05_Manual_Corona-II_XLC4
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5.3.2 Coaxial modules
As an extension for the dark field modules as well for the brightfield modules are coaxial beam splitter
setups are available. With the dark field setup, the possible focus options are B, C or D (option A is not
applicable).
Figure 5-16 Setup for bright field module
Figure 5-17 Setup for dark field module
In addition, it’s possible to order protection screens with AR coating to avoid dust on the beam splitter.
Figure 5-18 Protection screen options
CXT
Top side protection screen
CXB
Bottom side protection screen
CXS
Both sides protection screen
CXN
no protection screens
Note
: Protections screens towards the object might cause some optical effects, so these options
should be used carefully.
Top side
Bottom side