GB 01739 - Edition 07 - Januar
y 04
D 10
Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
Safety instructions
1/2
During exhaust maintenance, operator could be in contact with residues from the
exhaust port or with contaminated oil which could cause severe injury or death.
Always wear gloves, protective glasses and a breathing mask.
Standard precautions before any maintenance operation:
Before performing a maintenance operation, switch off the pump by setting the
main switch to "0", disconnect the main cable and wait 1 minute before
operating on the product.
If this last one remains connected, some components will still be energized.
This pump is not equipped with a lock out/tag out (LO/TO) device because it is designated
for use on process tools.
In order to properly secure the pump for installation and maintenance, it is required to
properly lock out/tag out the pump in accordance with OSHA
requirements.
After pumping on corrosive or toxic gases, in case of pump return for repair,
it is
strongly
recommended to seal the pump with blank flanges
(
see instructions on E 00
).
WARNING
WARNING
Chemical supplies coming from the tool, water and nitrogen need also to be
locked out/tagged out.
WARNING
Before starting any maintenance operations, be sure to check the pumping
conditions: toxicity, corrosion, of the pumped gases.
WARNING
Product tightness is guaranteed upon leaving the factory for normal operating
conditions.
It is the responsibility of the user to ensure that the level of tightness is maintained when
pumping dangerous gases.
CAUTION!
Before any intervention on the pump, we advise to prolonge N2 flow for 30mn.
CAUTION!
WARNING
Summary of Contents for Adixen ATH 1300 M
Page 1: ...ATH 1300 1600 M MT MAGLEV HYBRID TURBOMOLECULAR PUMPS User s Manual...
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