Alcatel Vacuum Technology Adixen ATH 1300 M, User Manual

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G 10
Pumping curves
Alcatel Vacuum Technology France - User’s Manual ATH 1300 M/MT - ATH 1600 M/MT
GB 00760 - Edition 02 - September 99
1/2
Inlet pressure (Pa)
Inlet pressure (mbar)
Pumping
speed (l/s)
0
500
400
300
200
100
900
1000
1100
1200
1500
1300
1400
800
700
600
10
-5
10
-4
10
-3
10
-6
10
-2
10
-1
10
1
1
10
-4
10
-3
10
-2
10
-1
1 10
1
10
3
10
2
Pumping speed versus inlet pressure
Upper limits
for continuous operation
ATH 1300 M, DN 200
ATH 1600 M, DN 200
N
2
H
2
N
2
H
2