AIXTRON
- Dokumentation
CONFIDENTIAL
85
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System Manual
Description
CRIUS II
Vacuum system
3.8
Vacuum system
The vacuum system comprises the following components:
•
Vacuum pumps
•
Manual, pneumatic, solenoid, and electro-pneumatic valves
•
Bypass lines with check valves to protect the system
•
Exhaust gas filters including a separate water cooling unit
3.8.1
Vacuum pumps
Glove box pump
Fig. 3-36,
85 shows the glove box pump. It is used for evacuating the glove
box.
Fig. 3-36
Glove box pump
DOR pump
Fig. 3-37,
85 shows the DOR pump. It is used for evacuating the intermedi-
ate volume between the inner and outer O-ring of the DOR system.
Fig. 3-37
DOR pump
