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CONFIDENTIAL
AIXTRON
- Dokumentation
Maintenance
System Manual
Gas system
CRIUS II
6
5
Set the pressure controller of the bubbler (item C in Fig. 6-34,
171) to
2000 mbar and the MFCs of the bubbler to their maximum value
6
Set the inject MFC on the dopant sources to its minimum value
7
Switch off CONTROL in AIXACT
•
The throttle valve is closed
8
Switch to maintenance mode
9
Open the MO vac valve in AIXACT for at least 10 minutes
10
Open both quarter turn manual valves (item H in Fig. 6-34,
171) on
the source manifold to the MO vac line for one minute
•
This will pump the source lines external to the bubbler
11
Close the MO vac valve and open the 4/2-way MO source valve. Wait
until the source line is filled again to 2000 mbar.
12
Close the 4/2-way MO source valve and open the MO vac valve again
for one minute
13
Repeat the pump/purge cycle (steps 11, 12) at least eight times using
H
2
14
Switch the system to N
2
15
Repeat the pump/purge cycle at least two times with N
2
16
Close both quarter turn manual valves
17
Leave the 4/2-way MO source valve open
18
Change the container under these conditions by breaking the bubbler
line VCR connection
•
The pressure controller isolates the system from the outside while
N
2
purges the connection lines. This prevents the source lines from
being contaminated by external air.
