AIXTRON
- Dokumentation
CONFIDENTIAL
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System Manual
Installation
CRIUS II
Site Requirements
4.4
Site Requirements
Environmental conditions
See Chapter 1.6.2 Environmental conditions,
13.
Vibrations
During the deposition process, the CRIUS II must not be exposed to notable
vibrations. For this reason, make sure that no equipment creating heavy vibra-
tions is installed in the vicinity of the CRIUS II. Also make sure that the ground
on which the system is installed is capable of absorbing vibrations.
Operating media
The CRIUS II must be supplied with the required operating media. See
Chapter 1.6 Installation data,
13.
The supply lines must be laid in keeping with the local safety regulations and
with the information in the media diagrams.
Space requirements
The clearance distance for escape routes must be in keeping with the local
safety regulations. Safety doors, covers, etc. must be installed in such a way
that the CRIUS II remains accessible from all sides for maintenance and ser-
vice work.
Ventilation system
You find the requirements for the ventilation system in the delivered installa-
tion plan.
4.5
Media connection
The end user has to install lockable interfaces for the media supply.
The end user is also responsible to control and interlock the gas supply in his
facility (facility-safety concept). If a toxic gas or hydrogen detection alarm
occurs, the customer must shut off (close) all toxic and flammable gas feed
lines to the system.
4.6
Assembly
NOTE:
Only specially trained AIXTRON service technicians are permitted to
install and to commission the CRIUS II. Other persons are not allowed to
perform these tasks.
The required steps are not described in this System Manual.
