AIXTRON
- Dokumentation
CONFIDENTIAL
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System Manual
Maintenance
CRIUS II
Gas system
24
Repeat the pump/purge cycle at least five times using N
2
25
Switch the system to H
2
26
Repeat the pump/purge cycle at least five times using H
2
27
Close the MO vac valve
28
Open both quarter turn valves (item H in Fig. 6-35,
173) on the source
manifold to the MO vac line to allow equalization between bubbler inlet
and outlet
29
Open the 4/2-way MO source valve in AIXACT
30
Reset the pressure controller from 2000 mbar to 1000 mbar and let the
pressure equalize
31
Close both quarter turn valves (item H in Fig. 6-35,
173) on the source
manifold to the MO vac line
32
Close the 4/2-way MO source valve in AIXACT
33
Set all MFCs to normal operating state (default)
34
Return to operation mode
35
For opening the bubbler (manual valves) please refer to the OEM of the
bubbler or contact your local AIXTRON service center
The source connection lines are now filled with pure hydrogen at atmospheric
pressure. The source is operational once the temperature in the bath has sta-
bilized.
6.13.3 Checking the communication
1
Enter a flow set value for a mass flow controller in AIXACT
2
Observe the actual flow value displayed in AIXACT
•
The actual value must automatically reach the set value
3
Check the pressure controllers in the same way
