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32
CONFIDENTIAL
AIXTRON
- Dokumentation
Safety
System Manual
Safety circuits
CRIUS II
2
Positions outside
Fig. 2-7,
32 shows the EMERGENCY-OFF buttons installed at the outside
of the CRIUS II.
Fig. 2-7
Positions of the EMERGENCY-OFF buttons outside: Front side (top), back side (bottom)
A EMERGENCY-OFF button at the reactor cabinet
B EMERGENCY-OFF button at the heater supply unit
