AIXTRON
- Dokumentation
CONFIDENTIAL
171
6
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System Manual
Maintenance
CRIUS II
Gas system
6.13
Gas system
6.13.1 Removing an MO bubbler
For identifying the components please refer to the delivered «Gas Mixing Sys-
tem» drawing.
1
Ensure that the bubbler is at atmospheric pressure (approx. 1000 mbar)
2
Close the 4/2-way MO source valve in AIXACT (item G in Fig. 6-34,
171)
Fig. 6-34
Standard MO source
3
Close the manual valves at the bubbler (item J in Fig. 6-34,
171) to
isolate the bubbler from the system
4
Switch the system to H
2
WARNING!
MO materials.
MO materials can be harmful to your health.
Wear protective gloves, gas mask and eye protectors when working with
MO materials.
A
B
A
G
C
P
E
F
I
K
D
L
H
H
J
J
A H
2
supply
B To MO run/vent line
C Pressure controller
D Source MFC
E Push MFC
F Measuring device for gas concentrations
(optional)
G 4/2-way MO source valve
H Quarter turn manual valve
I
MO vacuum (for changing the MO bubbler)
J Manual valve at the bubbler
K Thermostat heat bath
L MO bubbler
