AIXTRON
- Dokumentation
CONFIDENTIAL
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System Manual
Description
CRIUS II
Reactor
3.5.3
Tungsten heater
The system is heated by a three zone tungsten heater. See Fig. 3-11,
65.
The heater is located inside of the susceptor support below the susceptor.
Fig. 3-11
Tungsten heater
A Heater coils
Heater coils
The heater consists of three sets of tungsten-rhenium coils which are config-
ured as follows:
•
Zone A: Center
•
Zone B: Middle
•
Zone C: Outside
Fig. 3-12
Heater coils
A Zone A: Center
B Zone B: Middle
C Zone C: Outside
Each zone may be individually replaced. Power is fed through the ferrofluidic
feedthrough.
