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74
CONFIDENTIAL
AIXTRON
- Dokumentation
Description
System Manual
Gas system
CRIUS II
3
3.6.4
Hydride source
Hydride gases (e.g. AsH
3
) are used as source material. They are stored in gas
bottles and special cabinets outside of the system. Hydride gas is fed into the
reactor via a dosing unit.
The following versions of the hydride source are available:
•
Standard hydride source
•
Doping hydride source
Standard hydride
source
Fig. 3-22,
74 shows the gas diagram for the standard hydride source.
The 3/2-way valve (item C) has two operating states:
Open
: Hydride source on, carrier gas off
Closed
: Hydride source off, carrier gas on
The source MFC (item D) controls the hydride gas flow. The push MFC (item
E) adds further carrier gas to dilute the hydride gas.
Fig. 3-22
Standard hydride source
Doping hydride
source
The doping hydride source is used if the process requires low gas flows or a
large flow range. Fig. 3-23,
75 shows the gas diagram for the doping hydride
source.
The source MFC (item D) and the dilute MFC (item E) adjust the gas mixture.
The gas mixture is fed via the inject MFC (item F) into the hydride run/vent line.
The pressure controller (item G) controls the pressure operating point for the
inject MFC (item F) and leads away excess gas into the hydride vent line (item
I).
A
A
B
C
D
E
F
A H
2
supply
B Hydride gas supply
C 3/2-way valve
D Source MFC
E Push MFC
F To hydride run/vent line
