cr
ius_I
I_e
n_
00,
Ed
it
io
n
06/
201
0
162
CONFIDENTIAL
AIXTRON
- Dokumentation
Maintenance
System Manual
Reactor
CRIUS II
6
6.10.3 Checking the O-rings
Checking the O-
rings
1
Raise the reactor lid. See Chapter 6.10.2.1 Opening the reactor lid,
2
Visually check the O-rings for damage
3
Raise the reactor chamber. See Chapter 6.10.2.2 Opening the reactor
chamber,
4
Visually check the O-rings for damage
Replacing the O-
rings
1
Replace defective O-rings as follows:
1.1
Remove the defective O-ring with plastic tweezers
1.2
Carefully install the new O-ring
2
In case of a large O-ring, proceed as follows:
2.1
Fit the O-ring at the 3 o’clock and 9 o’clock positions
2.2
Then fit the 12 o’clock and 6 o’clock positions
2.3
Smooth the O-ring in the intermediate positions to avoid stretch-
ing and distorting the O-ring
