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14
CONFIDENTIAL
AIXTRON
- Dokumentation
Use, data
System Manual
Installation data
CRIUS II
1
1.6.4
Cooling water
Dew point diagram
Fig. 1-4
Dew point diagram
T
1
Room temperature
T
2
Minimum cooling water temperature
rH
Relative humidity
NOTE:
Prevent condensation! The temperature of the cooling water must
exceed the dew point of the ambient air by at least 2
°
C. See Fig. 1-4,
14.
10
15
20
25
30
35
40
20
25
30
35
40
45
50
55
60
65
100 %
90 %
80 %
70 %
60 %
50 %
40 %
30 %
20 %
10 %
T [°C]
1
T [°C]
2
rH
