Varian 948, Руководство по эксплуатации и обслуживанию

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Models 947, 948 and 960 Leak Detectors Operations and Service Manual
G-6
G.6.1 Test Piece Evacuated
The object to be tested is evacuated by the leak detector roughing pump, then valved into
the spectrometer vacuum system (see Figure G-1 and Figure G-2). The surface of the test
object is then probed with a small jet of helium to locate individual leaks, or surrounded by
helium (hooded) for an overall leak check.
Figure G-1 Test Piece Evacuated: Tracer Probe Used to Locate Leak
Figure G-2 Test Piece Evacuated and Hooded with Helium Atmosphere to
Determine Overall Leak Rate
G.6.2 Test Piece Pressurized
Figure G-3 is an illustration of a Detector Probe used to locate a leak in a pressurized test
piece.
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Figure G-3 Test Piece Pressurized: Detector Probe Used to Locate Leak