Ulvac VPC-1100, Руководство пользователя

Страница: 27 / 39

１８
4. Using the evaporator
4-2 Bell jar evacuation
1) Bell jar vent Completely closed
2) Glass bell jar Attach
3) Three-way valve ROUGH
4) Pirani vacuum gauge 10Pa or less Check
5) Three-way valve FORE
6) Main valve Completely closed
5. Using the coating equipment
5-1 Preparation
1) Open the bell jar See section 4-1
2) Attach electrode to the evaporation source (board or filament)
3) Supply the evaporation material to the evaporation source
4) Shutter Closed
5) Attach sample (base material)
6) Bell jar evacuation See section 4-2
5-2 Film formation
1)Turn on the evaporator main power.
2) Turn on the evaporator select switch.
3) HIGH (lamp lighting) Confirmation
4) MANUAL (lamp lights out) Confirmation
5) Turn on the evaporator power switch.
6) The current is gradually thrown to the evaporation source pushing the UP
▲
key.
7) Once the evaporation element is red hot and the vapor source has started to
melt, use the shutter to remove impurities from the evaporation element.
8) Open the shutter to apply film to the material to be coated (substrate).
9) Once vapor deposition is completed, close the shutter.
10) Turn off the evaporator power switch.
11) Turn off the evaporator main power.
12) Open the vacuum chamber, as described in section 4-1, and
remove the coated material (substrate).
Repeat as necessary from step 4-2.
Note: If using an PSE
－
150C electrical
evaporator
(optional part), please
refer to the PSE-150C electrical evaporator user manual.
Note
Film thickness: Adjusted by the coating time
Coating speed: Adjusted by varying the current applied to the evaporation
source.