Ulvac VPC-1100, Руководство пользователя

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(2) Product Overview
1. Uses of this product and prohibitions
This device is a vacuum coater which uses resistance heating evaporation in a
vacuum to evaporate materials and create a thin film.
In order to use this device properly, please do not put it to any of the prohibited
uses outlined below.
・
Using this device as a vacuum vessel.
・
Placing anything other than evaporation or test materials inside the
glass bell jar.
・
Any resale, repair or modification not approved by our company.
Prohibited
2. Purpose and function of safety equipment
Item Purpose Mechanism How to check
Water
supply cut
off
Prevents the oil
diffusion pump from
overheating Pressure switch detects cutoff.
Oil diffusion pump heater interlock.
Alarm warns if water supply cut off.
Auto reset when supply restored. Simulate a water
cutoff.
Short
circuit
Prevents electrical
shocks
Main breaker circuit interrupter.
Sensed current 30 mA
Manual reset. Use the circuit
interrupter’s test
button.
Protects the motor
from burnout
Oil-sealed rotary vacuum pump
magnetic contact’s thermal relay
shuts off current.
Manual reset. Start the
oil-sealed rotary
vacuum pump
and lower the
thermal relay
setting.
Reset to 3.6 A
afterwards.
Power
surge
Protects the oil
diffusion pump
heater Oil diffusion pump circuit protector
shuts off current. N/A
Prohibited
Disable the safety equipment before using this
device.