Ulvac VPC-1100, Руководство пользователя

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2. Inspecting the device before use
Inspection
The fixing clip at either end of the hoist’s wire
rope should be inspected daily to make sure
they have not come loose.
May cause the glass bell jar to fall.
Warning
Inspection
Make sure the hoist’s weight and the glass bell
jar cover’s eyebolt have not come loose.
May cause the glass bell jar to fall.
3. Using the exhaust system
3-1 Preparation
1) RP VENT Three-way valve main valve CLOSE
2) All switches on the operating panel OFF
3) If using an ionization vacuum gauge, attach the probe to the feed through collar’s
gauge port.
3-2 Operation
Exhaust system warm up
1) Your breaker ON
Receiving light on main breaker Should light up
2) Main breaker ON
3) Cooling water ON
4) RP1, RP2 ON
5) Three-way valve FORE
6) Pirani vacuum gauge 10Pa or less DP ON
7) Liquid nitrogen Pump in
8) DP warming up completes in 15 minutes.
Note
The amount of liquid nitrogen pumped in
Maximum intake 3.2 L (Including evaporated quantity)
Vapor Approx. 0.3L/h (At maximum intake)
If 3.2L is used, will remain effective for approx. 10 hours.
When all of the liquid nitrogen has evaporated, desorption of the trapped condensed
gas will take approximately 30 minutes, during which time the pressure will be reduced.
This is not a malfunction. Completely close the main valve to prevent the inside of the
bell jar from being contaminated.