Ulvac VPC-1100, Руководство пользователя

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３０
Optional parts name Use
Location for
fitting
Evaporation power supply cables
Power supply out cables for
deposition.
Factory
Metal bell jar
For heating the inside of the
bell jar.
Factory
Metal bell jar
(with water-cooling coil)
For heating the inside of the
bell jar.
Factory
Film formation controller
For measurement and control of
film thickness and film formation
speed.
On-site
Film thickness sensor
Sensor for film controller
measurement.
On-site
Cooling water piping for film
thickness sensor Introduction piping for cooling water
for film thickness sensor.
Factory
Automatic leakage valve
For main pump protection upon
power outage.
On-site