Ulvac VPC-1100, Руководство пользователя

Страница: 32 / 39

２３
3. Removing, maintaining and installing equipment
3-3 Oil mist trap (sold separately)
1) Tools needed none
2) Removal
Using both hands, rotate the underside of the oil mist trap in a counter-clockwise
direction.
3) Replacing the element
Please refer to the separate oil mist trap user manual.
4) Attachment
・
Attach the O-ring located on the underside of the oil mist trap.
・
Align the oil mist trap with the exhaust port of the oil-sealed rotary
vacuum pump, and then use both hands to rotate it in a clockwise
direction.
Caution: Make sure the O-ring does not drop off while tightening.
3-4 Glass bell jar O-ring
1) Tools needed none
2) Removal
・
Be careful not to damage the O-ring groove during removal.
3) Attachment
・
Coat the surface of the new O-ring with vacuum grease.
・
(As thinly as possible, so that a film forms)
・
Clean the inside of the O-ring groove.
・
Fit the O-ring inside the groove.
3-5 Glass bell jar
1) Necessary equipment dust mask gloves
2) Removal
Loosen the drop-stopper nut on the ring catch at the end of the wire rope and
remove the ring catch from the eyebolt.
・
Move the ring catch upwards until the weight touches the base of the
support.
・
Get two people to lift and remove the bell jar by holding the bell jar
cover’s handgrip.
3) Cleaning
・
Wear protective equipment (dust mask and gloves), and wipe away any
spatter with alcohol.
4) Attachment
・
Get two people to hold the bell jar cover’s handgrip and attach it so the
flange on the underside of the glass bell jar makes even contact with
the surface of the O-ring.
Caution: If the underside flange is on an angle, contact between the metal parts
will cause damage.
・
Lower the ring catch and attach it to the bell jar cover eyebolt, and then
tighten the drop-stopper nut.