Ulvac VPC-1100, Руководство пользователя

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8. List of consumable supplies
Location used Name Specification Material Number
Can
customer
replace?
Flange O-ring P-400 NBR 1 OK
Hermetic O-ring P-26 NBR 3 OK
Gauge port O-ring N-16 NBR 1 OK
Service port S O-ring P-30 NBR 7 OK
Service port L O-ring P-44 NBR 2 OK
Shutter port O-ring N-32 NBR 1 OK
Shutter shaft O-ring N-7 NBR 2 OK
Base plate stopper
O-ring
P-22A NBR 2 OK
Base plate welding rod
gasket
KV-1297-01-096 FPM 4 OK
Feed through
collar
Shutter bevel gear KV-1297-01-118 S45C 2 OK
O-ring for suction flange V-175 NBR 1 OK
O-ring for leakage valve N-6 NBR 1 OK
Upper portion
conversion
flange
O-ring for leakage valve N-8 NBR 1 OK
O-ring for suction flange
V-175(Attached
component)
FPM 1 OK
O-ring for valve body
(Attached
component)
FPM 1 OK
Main valve
O-ring for leakage valve
P-15(Attached
component)
FPM 2 ×
Lower portion
conversion
flange
O-ring for suction flange V-175 NBR 1 OK
Type 6 liquid
nitrogen trap
O-ring for suction flange V-175 NBR 1 OK
Three-way valve O-ring Attached --- 1 ×
O-ring N-6 NBR 1 OK
BELLJAR VENT
O-ring N-8 NBR 1 OK
RP VENT O-ring N-8 NBR 1 OK
The numbers listed above are for the standard specification. If optional parts are
attached, these numbers will differ.