２９
(7) Optional parts
Caution
Prohibited
Do not modify this product using any parts
other than the standard optional parts specified
by us.
We will not be responsible for any consequences.
1. Table of standard optional parts
Optional parts name
Use
Location for
fitting
Evaporator electrode
1- 2-button switch
Evaporator electrode
2- 2-button switch
Evaporator electrode
2- 3-button switch
Simultaneous evaporation using
multiple sources
To create multi-layer films
Factory
Ø 340 sample holder
Holds the sample in place
On-site
Base material heater
Heats the sample
On-site
Electrode partition board
Separates evaporation source
Prevents contamination
On-site
Non-stick board
Prevents evaporation from sticking
to the glass bell jar
On-site
UFC070 adapter
To fit an 070 Conflat flange
On-site
Measurement rack
Built-in ionization vacuum gauge
GI-M2, film thickness controller
CRTM-6000G rack
On-site
Side panel, rear panel
To comply with safety regulations
On-site
Supplemental shutter
To fit mask holder
On-site
Carbon electrode
To create a carbon thin film
On-site
Gas intake port
To inject gas into the bell jar
On-site
Film sensor
Film, coating speed measurement
On-site
Oil mist trap
To prevent oil fumes from escaping
from the oil-sealed rotary vacuum
pump’s exhaust port.
On-site
Evaporation power supply: SEREM
Power supply for deposition (with
external automatic control function)
Film formation speed control can
be made in combination with the
film controller.
On-site
Содержание VPC-1100
Страница 16: ...7 Layout of the switches handle and operation lever...
Страница 17: ...Flow chart Wiring diagram GLD 202A...
