Ulvac VPC-1100, Руководство пользователя

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Equipment Name Type / Specifications Number
3) Oil diffusion pump
･
Type ULK-06A
･
Evacuation speed 1100L/sec.
･
Max. pressure < 2.6 x 10
-6
Pa
･
Exhaust port VG100, VG40
･
Power consumption 1.2 kW
Hydraulic oil D-31 0.35 L
Cooling water 1.5 L/min.
1
4) Oil-sealed rotary
vacuum pump
･
Type GLD-202A
･
Evacuation speed 200L/min.
･
Max. pressure 6.7 x 10
-1
Pa (Measured by
Pirani vacuum gauge)
･
Power consumption 0.55 kW
Oil SMR-100 1.1 L
2
5) Main valve ･
Type
SBVM-6AX
･
Butterfly
valve
1
6) Liquid nitrogen trap ･
Bore diameter 150 A
･
Injection amount Approx. 3.5 L (Including vapor)
1
7) Three-way valve ･
Type Slide
･
Bore diameter 20 A
1
8) Feed through collar ･
Number of ports 20
･
Dimensions Inner diameter 390 mm x H
150 mm
･
Material Nickel-plated iron
･
Accessories 3-switch electrode
Hermetic port
Gauge port
Shutter
Backup ports Electrode
UFC flange
Shutter
Service port
1
4
3
1
1
4
2
1
4
9) Hoist ･
Type Balance weight
･
Stroke 400 mm
1