Ulvac VPC-1100, Руководство пользователя

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3. Removing, maintaining and installing equipment
3-2 Oil diffusion pump
1) Tools needed 13mm, 17mm spanner (1 each)
2) Removal
・
Make sure all equipment is turned off and the cooling water has
been shut off.
・
Open the bell jar vent.
・
Three-way valve FORE (Vent the DP interior)
・
Disconnect the heater wiring connectors. (2 places)
・
Remove the exhaust port rough pipe.
・
Remove the oil diffusion pump’s cooling water pipes. (intake and
outflow, 2 locations)
・
Remove the M10 fixing nuts on the intake flange. (8 places)
・
Remove the retaining bracket.
・
Remove the oil diffusion pump by pulling it towards you.
3) Replace oil
See the separate ULK-06A oil diffusion pump user manual.
4) Attachment
・
Place the oil diffusion pump underneath the liquid nitrogen trap.
・
Get two people to lift the oil diffusion pump and tighten 2 M10 nuts
3 to 4 turns. Then attach the remaining 6 nuts.
・
Align the rough pipe with the exhaust port, and tighten the M10
nuts equally. (In order, starting from the far corner)
・
After cleaning the exhaust port’s O-ring, attach the rough pipe.
・
Attach the oil diffusion pump’s cooling water pipes. (intake and
outflow, 2 locations)
・
Connect the heater wiring connectors. (2 places)
・
Attach the retaining bracket.
M10nuts
Retaining bracket
Heater
wiring
connector