Ulvac VPC-1100, Руководство пользователя

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１５
(4) Operating
1. Dangers and safety precautions during operation
Check
Make sure the vaporization power output is
switched OFF before using the electrode
switch.
May cause sparks or damage to the switch.
Prohibited
Do not strike the glass bell jar or heat it to
above 50°C.
Damaging the inner mechanism while
there is a vacuum can cause fragments to
fly out.
May cause damage.
Warning
Check ventilation
Make sure the room is well-ventilated when
using liquid nitrogen.
Vapor from the liquid nitrogen can lower
the oxygen levels in the room.
May cause accidents due to lack of oxygen.
Wear gloves
When handling liquid nitrogen, wear rubber
gloves or other protection over exposed
areas of skin.
A droplet coming into contact with your skin can be
extremely painful.
Venting
After stopping the oil-sealed rotary vacuum
pump, open the RP vent and vent the
rough pipe to the atmosphere.
Prevents oil backflow.
Caution
Check it is
completely closed
After confirming that the MAIN valve is
completely closed, vent the inside of the
bell jar to the atmosphere.
If air enters the oil diffusion pump while it is in
operation, the oil from the oil diffusion pump will be
degraded and its performance will deteriorate
sharply.
If air is allowed to enter while liquid nitrogen is
being poured in, large amounts of condensed gas
will gather in the trap and the performance will
deteriorate sharply.