Ulvac VPC-1100, Руководство пользователя

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3. Specifications
Max. Pressure 1.3 x 10
-4
Pa
(Using liquid nitrogen, with no load in the vacuum tank)
Evacuation time Less than 10 min. to 10
-4
Pa
(Using liquid nitrogen, with no load in the vacuum tank)
Power consumption 100 V single phase 1.0 kVA
200 V three-phase 5.0 kVA
Water consumption
Water temp./pressure
1.5 L/min.
20 °C / 200-300 kPa (gauge pressure)
Dimensions
Weight
W 1235 mm x D 836 mm x H 2155 mm
About 313 kg
Coating JIS S-5-462 printing (Munsell 5GY8/0.5)
Listed above are the standard specifications.
Please refer to the VPC-1100 (Special) specifications for details of special configurations.
4. Individual equipment specifications
Equipment Name Type / Specifications Number
1) Glass bell jar
･
Dimensions Inner diameter Ø 390 mm x H 350 mm
･
Material Pyrex
1
2) Evaporation power
supply
-
Model: PSE-150C
-
Dimensions: W480 mm × D435.3 mm × H149 mm
-
Input: Single phase 200 V
-
Output: 150 A max.
-
Rating: 30 minutes
-
Control method Thyristor AC phase control method
-
Output control
Constant power operation
Constant current operation
Constant voltage operation
(Setting when shipped out: constant current)
-
Load output 3-Position
-
Appurtenant devices:
-
Output cable (38 mm2 × 2 m)
1