Ulvac MS120A, Инструкция по эксплуатации

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YO20-0938-DI-001-00
3.5.3 Cooling water piping
Use appropriate joints
The cooling water port of this machine is Rc 3/8. Connect appropriate joints to
the cooling water piping. Do not confuse between inlet cooling water port and
the outlet cooling water port.
Items to comply with in the use of cooling water piping
Comply with the items described below for cooling water and piping.
●
Be sure to supply the required amount of cooling water.
Especially during operation at a high suction-pressure, if the amount of water falls below the
specified amount, the temperature of this machine increases the pump malfunctions. It is
recommended to install a flowmeter in the cooling water system and provide an interlock that stops
this machine when the amount of water becomes equal to or lower than the specified value.
●
When stopping the operation in winter, drain water inside
When operation is stopped in winter, water in the cooling water piping may freeze, causing damage to
them. While operation is stopped, drain water inside by blowing compressed air from the cooling water
outlet or by other means.
●
It is recommended to use water with fewer impurities (e.g. industrial water; refer to the
table below) for cooling water.
It is recommended to use water with fewer impurities (e.g. industrial water; refer to the table below) for
cooling water of this machine. It is recommended to use "Table 6 [for reference]: The standard quality
of water supply in the Japanese industrial water works."
In the cooling water system of this machine, water scale, such as calcium carbonate, settles on
depending on the water quality, which may reduce the cooling water flow rate.
In addition, chlorine ions corrode the inner walls, which may cause leakage of cooling water.
Furthermore, when pure water is used, metal is separated therefrom, which may cause leakage of
cooling water.
Note that in advance that in such a case, the repair cost may be borne by you.
Table 6 [Reference] The standard quality of water supply in the Japanese industrial water works
Turbidity pH Alkalinity Hardness
Total residue
on
evaporation
Chloride ion Iron Manganese
20mg / L
or less
6.5~8.0
75mg/L
or less
120mg/L or
less
250mg
／
L or
less
80mg/L
or less
0.3mg/L
or less
0.2mg/L
or less
Established by: Japan Industrial Water Association (Industrial water quality standard committee)
●
Do not install electrical equipment or wiring on the floor below or near this machine
This
is
designed so that no water leak occurs under the specified conditions and checked through a water
leak test. However, in the event of abnormal conditions outside the specifications (e.g. an abnormal increase
in water pressure), a water leak may occur. In that case, water will continue to leak unless the supply from
the equipment is stopped. Do not install electrical equipment or wiring on the floor below or near this machine.
It is also recommended to place water leak sensors on the floor below and near this machine so that the
power is shut off if a leak sensor is activated.
NOTES
NOTES