Ulvac MS120A, Инструкция по эксплуатации

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34
YO20-0938-DI-001-00
4. Operation
4.1 Precautions on operation
Do not use any gas other than inability gas
The pumping of toxic gas, flammable gas, combustible gas, corrosive gas,
explosive gas and particle gas, may damage this machine and hazardous.
Furthermore, the chemical reaction of remaining gases and/or generated
particle and gases may cause the explosion, not only during operation but also
after stop operation.
Do not use toxic gases into this machine
When toxic gases were pumped, not only this machine but also the oil becomes
toxic. Please be careful during maintenance.
Do not use in areas where a hazardous atmosphere may form or occur
Do not use in areas where a hazardous atmosphere may be formed or occur
due to explosive gas. Otherwise, injury or fire may occur.
Do not block the exhaust port
Do not operate this machine with any equipment installed on the exhaust port
side that prevents gas from passing in such a way as to block the exhaust port.
Pressure in this machine may increase, which causes a rupture of or oil leakage
from the casing or level gauge, or overloads the electric motor. This machine is
not explosion proof structure. The guaranteed pressure value of this machine
is 0.03MPaG (0.3kg / cm
2
G) (gauge pressure).
Ensure a space of at least 0.5 m in front of the ventilation inlet.
If there are walls or obstacles within 0.5 m from the ventilation inlet, there is a
risk of burn injury and fire due to abnormal overheating.
During operation, do not touch the pump body or piping.
During operation, do not touch the bump body, motor, or piping as they reach
extremely high temperature. If a human body touches the machine, it may get
burned.
Confirm that the valve is open
If the valve is installed on a pipe after the exhaust port, make sure that the valve
is open.
Be sure to supply cooling water during operation.
Be sure to supply cooling water during operation. The required amount of
cooling water is as follows:
- Amount of cooling water: 4.0 L/min. or more
- Cooling water inlet/outlet differential pressure: 0.1 to 0.3 MPaG (gauge
pressure)
- Cooling water temperature: 10 to 30
℃
NOTES