Ulvac MS120A, Инструкция по эксплуатации

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YO20-0938-DI-001-00
3.1.2 Storage environment requirements
Store into following conditions when this machine will be stored at warehouse or clean storage room prior to
installation without use for a long period of time.
Ambient temperature -20 to 60°C (No freezing)
Ambient humidity 95 %RH or less (No condensation)
Altitude 1,000m or less of altitude above sea level
Vibration resistance Vibration acceleration of 0.5G (114dB) or less
Others
No dust
The room must be ventilated.
Do not stack this machine, position this machine sideways, or stand it up.
Do not apply shock to this machine.
Do not expose this machine to direct sunlight.
Keep this machine away from heat sources.
Be sure to release the water in the cooling water piping before storage.
In low temperatures (0°C or less), parts may be damaged by frozen water.
Do not incline this machine by 10 degrees or more.
3.1.3 Environmental requirements for installation and operation
This machine is a unit with precise clearances. Confirm that the following requirements are satisfied during
installation and operation.
Ambient temperature
・
Inhaled gas temperature
5 to 40
℃
(Inhaled gas temperature is shown in terms of atmospheric
pressure.)
Ambient humidity 95 %RH or less (No condensation)
Altitude
1,000m or less of altitude above sea level
Power supply Overvoltage category II (IEC61010-1)
Others
Pollution Degree 2 or less (IEC61010-1)
No corrosive or explosive gas.
No dust
The room must be ventilated.
Do not stack this machine, position this machine sideways, or stand it up.
Do not apply shock to this machine.
Do not expose this machine to direct sunlight.
Keep this machine away from heat sources.
After moving to the installation location, adjust the four adjusters within the
range of 0 to 10mm and install this machine in a horizontal position.
Securely fix this machine in case of an earthquake.