Ulvac MS120A, Инструкция по эксплуатации

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47
YO20-0938-DI-001-00
Indication Alarm Name Status
ov
（ov）
Overvoltage in the main
circuit
An overvoltage has been detected.
Cause Measures Reference
Occurrence of power outage Check the power wiring. 3.6.1
The motor is ground fault. Contact to ULVAC service center.
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Document
Extremely high power supply
voltage
Check the supply voltage.
➡
Reduce the voltage to the power supply specifications
of this machine. 7.1
Inverter failure Contact to ULVAC service center.
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Document
Indication Alarm Name Status
oH
（oH）
Inverter overheating Inverter overheating was detected.
Cause Measures Reference
Excessive ambient
temperature
Reduce the ambient temperature. 3.1.3
Ventilation fan failure Contact to ULVAC service center.
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Insufficient cooling water flow
rate
Check the cooling water and increase the amount of
supply.
3.5.2
Insufficient differential pressure at the cooling water
inlet/outlet
➡
Increase the supply pressure.
3.5.2
The cooling water piping is clogged, or impurities are
mixed in the cooling water.
➡
Clean the piping.
3.5.2
Leakage from the cooling water piping
➡
If it is in this machine, Contact to ULVAC service
center.
End of
Document