Ulvac MS120A, Инструкция по эксплуатации

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YO20-0938-DI-001-00
3.5.2 Dedicated silencer (Separately packed)
Install the dedicated silencer in a horizontal position.
If the dedicated silencer is installed on a sloping floor or if adjustment of the
adjuster is unbalanced, it may cause noise or malfunction.
After assembling the pipes, perform a leak test for the entire system.
In the event of leakage, the process gas leaks from the pump, which may affect
the human body. In addition, there is a danger that air enters the inside of the
pump, causing abnormal reactions (ignition/explosion).
This machine comes with a dedicated silencer and KF40 pressure-resistant clamp / outer ring for mounting in
a separate package.
Adjust the adjuster and install it as horizontally as possible. If necessary, adjust the adjusters while checking
the level.
The recommended tightening torque of the long nuts for the pressure-resistant clamp is 2N
・
m. (8 mm in the
diagonal direction)
NOTES
水平
Horizontal