Ulvac MS120A, Инструкция по эксплуатации

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46
YO20-0938-DI-001-00
The output power is out of
order due to the open-
phase of the power supply
wiring.
Check the power wiring. 3.6.1
Indication Alarm Name Status
oL2
（oL2）
Inverter overload The inverter overload protection is activated.
Cause Measures Reference
Pump overload
Unable to rotate due to foreign matters.
➡
Contact to ULVAC service center.
End of
Document
Increased back pressure.
➡
Clean and wash the piping on the exhaust side of the
pump.
3.5.1
Damage to bearing.
➡
Contact to ULVAC service center.
End of
Document
High intake pressure
➡
Check the piping on the inlet side (for leakage etc.).
3.5.1
Blockage in exhaust piping
Clean and wash the piping on the exhaust side of the
pump.
3.5.1
Not to reach the steady
rotation speed.
The load at startup is high.
➡
At startup of this machine, apply loads after reaching
the steady rotation speed.
4.1
The output power is out of
order due to the open-phase
of the power supply wiring.
Check the power wiring. 3.6.1
Poor warm-up operation
Loads are applied without warming up.
➡
Warm up for approx. 30 minutes after startup.
Indication Alarm Name Status
oPr
（oPr）
Keypad connection
failure
The cable between the inverter and the controller has
been broken.
Cause Measures Reference
The wiring between the inverter
and the controller has been
broken.
Contact to ULVAC service center.
End of
Document