Ulvac MS120A, Инструкция по эксплуатации

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50
YO20-0938-DI-001-00
7. Specifications
7.1 Performance Specifications
Model MS120A
Displacement
※
1
Maximum
m 3 / hr
115
atmospheric
pressure
80
Ultimate pressure Pa
≦
0.6
Power-supply voltage (Select) VAC 3-phase, 200 to 240±10% or 380 to 480±10%. 50/60 Hz
Approximate
power
consumption
At ultimate
pressure
kW
2.4
Under
maximum load
3.0
Motor capacity 3.7
Amount of cooling water
L /
min
>4.0
Amount of purge gas*1 SLM
0 ～ 50
Maximum water vapor
throughput
*1
kg / hr 1.5
Noise value
At ultimate
pressure
dB(A) 61
Inlet port flange KF50 、 VG50
Exhaust port flange KF40
Surface treatment Special surface treatment
Lubricating oil BARRIERTA J100FLUID
、
J100FLUID E (NOK
クリューバ
)
DRP
mL
240
MBP ━
External
dimensions
Width
mm
311
Length
704
（
945: silencer included)
Height
307
（
536: silencer included)
Mass kg
132
（
139: silencer included)
Overseas safety standards CE 、 cTUVus
*1 Representative value