Ulvac MS120A, Инструкция по эксплуатации

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YO20-0938-DI-001-00
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Specifications of connections
Pipe fittings of φ6.35 mm
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Applicable piping
Pressure resistance: fittings of 0.9 MPa or more and SUS piping with an outer diameter of φ6.35 mm
Heatproof temperature: 100 ℃ or more
Supply pressure: 0.09 to 0.11 MPaG Flow rate: 48 to 55 SLM (values as a guide)
Figure 12: Purge gas supply pressure and flow rate (for reference)
3.5.5 Drain
This machine is equipped with a drain valve in the exhaust piping to prevent the liquid condensed on the
exhaust side from accumulating inside the pump.
For positive liquid discharge of condensable gas connect a drain pipe to customers discharge connection
area.
Periodically, discharge the remaining liquid manually or use other pump to discharge when this machine is
stopped. If to discharge during the operation is under the vacuum, provide a structure that prevents
backflow. It may have a flow back if this machine is running at that point.
Figure 13: Drain
Drain valve
(Rc3/8)