Ulvac MS120A, Инструкция по эксплуатации

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YO２０-0938-DI-001-00
●
To ensure this machine remains usable for a long time, before installing, operating, inspecting, or
maintaining it, be sure to read this manual and fully understand the safety notes as well as the pump's
specifications and operating procedures.
●
Note that the specifications, prices, and other contents in this manual are subject to change without
notice for improvement or other reasons. Changes are released as a revision that updates the
document number listed on the top-right corner of the instruction manual's cover.
●
Be sure to give this document to the end user who uses the product.
●
Copying this instruction manual in whole or in part for third parties without our permission is strictly
prohibited.
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This document is intended for users whose native language is Japanese. If users whose native
language is not Japanese perform work related to this machine, thoroughly provide safety training and
handling instructions under your own responsibility.
This manual applies to MS120A.
Symbols and numbers used for models have the following meanings.
About this Manual
Applicable Model
Model
Revisio n
MS120
Naming
N
－
A
Model
：
Design Displacement
120 : 120 m 3 /hr
Revision
A ： Latest revision symbol
Naming
N
：
Normal specifications
Pump head option
2 1
－
① ②
① Sealing material
2
：
Fluoro-rubber
4 ： Perfluoroelastomer
②
Voltage
1 ： 200V class
2 ： 400V class