Ulvac MS120A, Инструкция по эксплуатации

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YO20-0938-DI-001-00
Respect the environmental conditions
This machine has a precise clearance. Confirm the storage location and satisfies
the requirements listed in "3.1.3 Environmental conditions during installation
and operation."
1.4 Disposal
Ask a waste disposal specialist to dispose of this pump if you have used
it to exhaust harmful gas that may endanger human health.
Ask a waste disposal specialist to dispose of this pump if you have used it to
exhaust harmful gas that may endanger human health.
Dispose of this pump according to the laws and ordinances issued by your local government.
Particularly if you have used this pump to exhaust harmful gas, ask a waste disposal specialist to
dispose of this pump. The customer must incur any disposal-related costs.
1.5 Protective Device
Be sure to install an earth leakage circuit breaker.
If no earth leakage circuit breaker is installed, then equipment burnout, fire, or
electrical shock may occur.
This pump is not equipped with a power interrupter and leak detector.
When selecting a ground-fault interrupter, refer to "3.6 Electric Wiring."
1.6 Safety Measures and Waring Risk
1.6.1 Vacuum pumping and exhaust of hazardous gases or substances
Do not exhaust toxic gas, combustion gas, flammable gas, corrosive gas,
explosive gas, or gas containing fine powder
It is extremely dangerous to exhaust toxic gas, combustion gas, flammable gas,
corrosive gas, explosive gas, or gas containing fine powder. Furthermore, if
these gases were pumped into the machine, it is extremely dangerous as they
may ignite or explode due to residual gases or products not only during
operation but also after the machine stops. Do not discharge gases with these
properties. When exhausting such gas, dilute it sufficiently to the extent that the
risk of explosion and ignition is eliminated, before exhausting.
Wear protective equipment
During work such as inspection, wear protective equipment suitable for toxic
substances for use.
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