
MULTI GAUGE CONTROLLER
COMMUNICATION
continued from previous page
NAME OF VARIABLE
ADDRESS TYPE KIND
RANGE [UNIT]
Setpoint HIGH – vacuum value
R/W
FLOAT
�
..
�
[mbar]
Setpoint LOW – vacuum value
R/W
FLOAT
�
..
�
[mbar]
Setpoint HIGH – vacuum value
R/W
FLOAT
�
..
�
[mbar]
Setpoint LOW – vacuum value
R/W
FLOAT
�
..
�
[mbar]
Setpoint HIGH – vacuum value
R/W
FLOAT
�
..
�
[mbar]
Setpoint LOW – vacuum value
R/W
FLOAT
�
..
�
[mbar]
Setpoint HIGH – vacuum value
R/W
FLOAT
�
..
�
[mbar]
Setpoint
LOW – vacuum value
R/W
FLOAT
�
..
�
[mbar]
Setpoint
HIGH – vacuum value
R/W
FLOAT
�
..
�
[mbar]
Setpoint source
R/W
UINT
see tab. .
Setpoint source
R/W
UINT
see tab. .
Setpoint source
R/W
UINT
see tab. .
Setpoint source
R/W
UINT
see tab. .
Setpoint source
R/W
UINT
see tab. .
Setpoint source
R/W
UINT
see tab. .
Setpoint source
R/W
UINT
see tab. .
Setpoint source
R/W
UINT
see tab. .
Setpoint source
R/W
UINT
see tab. .
Setpoint
source
R/W
UINT
see tab. .
VACUUM CHANNEL - PASSIVE GAUGE
Channel - Emission ON/OFF
R/W
UINT
..
Channel - Degassing ON/OFF
R/W
UINT
..
Channel - Gauge type
R/W
UINT
see tab. .
Channel - Emission control
R/W
UINT
see tab. .
Channel - ilter:
- Low
- Medium
- High
R/W
UINT
..
Channel - Gas type
R/W
UINT
see tab. .
Channel - def. correction factor
R/W
UINT
..
Channel - Degassing time
R/W
UINT
..
[min]
Channel - current time to complete
degassing (min)
R
UINT
..
[min]
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