
COMMUNICATION
MULTI GAUGE CONTROLLER
continued from previous page
NAME OF VARIABLE
ADDRESS TYPE KIND
RANGE [UNIT]
Channel - Min. voltage of def. gauge
R/W
UINT
..
Channel - Max. voltage of def. gauge
R/W
UINT
..
[ uA]
Channel - Full scale parameter of def.
gauge
R/W
UINT
..
[Torr]
VACUUM CHANNEL - ACTIVE GAUGE
Channel - Emission ON/OFF
R/W
UINT
..
Channel - Degassing ON/OFF
R/W
UINT
..
Channel - Auto identi ication
R/W
UINT
..
Channel - Gauge type
R/W
UINT
see tab. .
Channel - Emission control
R/W
UINT
see tab. .
Channel - ilter:
- Low
- Medium
- High
R/W
UINT
..
Channel - Gas type
R/W
UINT
see tab. .
Channel - def. correction factor
R/W
UINT
..
Channel - Degassing time
R/W
UINT
..
[min]
Channel - current time to complete
degassing (min)
R
UINT
..
[min]
Channel - current time to complete
degassing (sec)
R
UINT
..
[sec]
Channel - Factor A of def. gauge
R/W
UINT
..
[W]
Channel - Factor B of def. gauge
R/W
UINT
..
Channel - Min. voltage of def. gauge
R/W
UINT
..
Channel - Max. voltage of def. gauge
R/W
UINT
..
[ uA]
Channel - Full scale param. of def.
gauge
R/W
UINT
..
[Torr]
Table . : Basic registers table
Page
User manual rev.