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G 03900 - Edition 03 - Februar

y 10

1/1

C 40

Operating mode with HHR

Start-up of the M4 monitoring system ...................................

M4 monitoring system function table ....................................

Use of the M4 monitoring system for pumping operation ..

Saving and loading of pump configuration (with M4) .........

M4 monitoring setting for transport ......................................

C 41

C 42

C 43

C 44

C 45

adixen Vacuum Products - A3H Series Operating instructions

Содержание Adixen A1503H

Страница 1: ...Operating instructions Operating instructions Original Original Betrieb Betrieb A3H Series Multistage Roots dry pump EN EN...

Страница 2: ...y pump We thank you and are proud to include you in our customers This product has benefited from adixen Vacuum Product s many years of experience in semi conductor processes and dry pumping For optim...

Страница 3: ...served including copying this document in whole or any part without prior written authorization from adixen Vacuum Products Specifications pictures and informations are subject to change without notic...

Страница 4: ...on B 110 RS 232 or RS 485 link wiring Chapter C OPERATION C 000 Safety recommendations for harsh processes C 010 Operating modes C 020 M4 monitoring system parameters C 040 Operating mode with HHR C 0...

Страница 5: ...are parts Instructions of use F 010 Delivered accessories spare parts Chapter G APPENDIX G 100 Declaration of conformity G 110 A3H Series electrical schematic G 200 Declaration of contamination Indica...

Страница 6: ...is product are guaranteed provided it is used normally in the operating conditions defined in this manual It is the customer s task to train operators to use the product if they do not speak the langu...

Страница 7: ...se of fault HHR Hand held remote connection WATER IN Cooling circuit connection PRESSURE MAX 101 PSI 7 bars Cooling circuit maximum pressure WATER OUT Output water connection NITROGEN Inert gas purge...

Страница 8: ...se muscle strain or back injury Use lifting aids and proper lifting techniques when removing or replacing Located on the upper cover this label warns the user against pumped process gas that could be...

Страница 9: ...ch off the pum p and disco nne ct the main pow er cabl e befo re ope ning the pow er box cove r W A RN IN G Leak age curr ent may be grea ter than 3 5 mA Eart h conn ectio n is esse ntia l befo re con...

Страница 10: ...ion Operating instructions A3H Series A A 010 Dry pump operational principle A 020 A3H Series dry pump range A 030 M4 monitoring system A 040 Technical characteristics A 050 Accessories adixen Vacuum...

Страница 11: ...e process gas by regulating the pump temperature and adjusting it to each process in order to limit gas condensation Multi stage Roots principle The Dry pump consists of 5 Roots type stages The two ro...

Страница 12: ...a trap and a deflector The vacuum tightness is ensured by the motor design This system provides total safety regarding leaks outside the pump and requires no maintenance The pump is fitted with an an...

Страница 13: ...ons all models EHT version Extended High Temperature A1503H and A1803H This configuration is recommended for all applications requiring the pump and gas temperature to be as high as possible to avoid...

Страница 14: ...requiring the pumping of a chamber volume of 1m3 to 50m3 Available on A203H and A1803H models this version features additional frequency converter on the dry pump other versions are available please...

Страница 15: ...xhaust Mains switch Remote control connector Configuration switch Coding wheel Hand held remote control connector RS 232 485 connector RS 485 connector Mains power supply Facilities water gas Electric...

Страница 16: ...03 Inlet Water valve Anti suckback valve Silencer Roots TP TC A803H Principle schematic TLP THP Temperature sensor of pump alert alarm and setpoint Tc Temperature sensor of motor alarm for ELT version...

Страница 17: ...HP HP LP LP LP N2 purge circuit Principle schematic Water inlet Water outlet Exhaust Water flowmeter Water valve FB203 Inlet Silencer Anti suckback valve Frequency converter Roots 1803 THP TC1 TC2 Fre...

Страница 18: ...nel and emergency stop button It allows to exchange data with the hand held remote and ensures the interface with the supervision network M4 monitoring can be interfaced with the main production equip...

Страница 19: ...oring Maintenance time control Supervision Network Remote control connector OEM interface Mains Emergency stop output Roots motor FB203 motor Actuators valves Sensors Electronic cabinet HHR Alternativ...

Страница 20: ...3 6 7 10 4 Maximum continuous inlet flow slm 150 150 100 100 70 100 Power supply 1 V 200 230 V 380 460 V 3 phases 50 60 Hz Power consumption at ultimate pressure 50 60 Hz kW 1 8 2 2 2 2 2 4 3 2 3 4 2...

Страница 21: ...l conditions Use of the product Altitude Ambient oparating temperature Maximum relative humidity Transient overvoltage Pollution degree indoor use up to 2000m 5 to 40 C 41 to 104 F 80 for temp up to 3...

Страница 22: ...aracteristics A203H dimensions mm 390 167 223 409 565 585 148 92 907 752 A 747 674 805 29 728 78 B 176 70 110 4 45 25 34 99 73 Outlet DN40 Inlet DN 50 Large Volume option A 1055 41 5 B 221 8 7 adixen...

Страница 23: ...ion 04 August 12 176 75 198 110 845 704 880 293 92 148 390 167 223 835 260 612 540 60 29 728 41 11 18 33 99 54 152 Outlet DN 40 Inlet DN 100 Minimum space for connection A803H dimensions mm adixen Vac...

Страница 24: ...cs A1503H A1803H dimensions mm 100 60 128 5 293 959 797 990 28 29 198 75 240 240 390 195 998 260 605 533 60 193 891 41 15 54 18 15 56 5 72 Outlet DN 40 Inlet DN 100 or DN 160 Minimum space for connect...

Страница 25: ...STEEL 4 SCREWS H M12 45 SECTION S S P1 P2 P3 P4 S S 39 39 390 A B C 312 25 58 25 58 70 45 Z X Y 312 Load by foot DaN A203H A803H A1503H A1803H P1 81 8 105 161 P2 68 9 110 129 P3 67 4 83 141 P4 56 9 8...

Страница 26: ...119988S Cable 15m 107079 Interface boards OEM Remote control This device ensures direct interface between monitoring and the main production equipment contact the manufacturer s service center Manual...

Страница 27: ...PTFE protection P N DN 40 O ring corrosion resistant 108785 Lonworks interface A3H Series offer a wide range of type of communication RS 232 RS 485 Dry contacts HHR In addition two other interfaces ar...

Страница 28: ...Filling the machine oil housings B 030 Connection to the cooling circuit B 040 Inert gas purge connection N2 connection B 050 Electrical connection B 051 Checking the direction of rotation at initial...

Страница 29: ...ctromagnetic compatibility rating and make it unsafe to use The manufacturer declines all liability for the consequences of such operations The product s EMC rating is obtained on the understanding th...

Страница 30: ...ing any work on the product Electric shock hazard on touching When the main isolator is switched to the 0 position items located between the mains connection and the isolator are still under mains vol...

Страница 31: ...eet of the tool The products are designed to avoid subjecting users to heat hazards However specific operating conditions may exist that require extra caution from users due to the high temperatures o...

Страница 32: ...witch power off main switch to 0 position before opening the electrical box and unlock the circuit breakers Do not expose any part of the human body to vacuum The product is supplied with the inlet an...

Страница 33: ...803H Large Volume Water flow minimum 2 l mn 2 5 l mn 2 5 l mn 2 5 l mn 2 5 l mn Water temperature 10 to 25 C Pressure 2 6 103 hPa 29 to 87 psi relative pressure Connection Inlet type Outlet type Mater...

Страница 34: ...5 A AWG 10 4 mm2 33 A 29 5 A 35 A AWG 10 4 mm2 30 A 29 5 A 35 A AWG 10 4mm2 Power supply voltage High voltage 380 460 V 50 60 Hz Full load current at 380V Full load current at 460V Breaker size Cable...

Страница 35: ...the crate Open the crate Remove additional packages from the crate and set aside Unpacking Packaging dimensions and weight Tolerance 20 mm Pump Dim inch mm Weight lbs kg A B C A203H 47 2 1200 42 1 107...

Страница 36: ...have been removed there is a risk of internal part corrosion We advise to pressurize the pump with Nitrogen or dry air 200 hPa relativ pressure to seal the inlet and exhaust ports and to store it at...

Страница 37: ...pads of the frame and lower the pump on the wheels Remove any additional packages from the crate and set aside These packages will contain cables accessories and so forth WARNING HEAVY OBJET Can cause...

Страница 38: ...rated in the horizontal position in support on its feet with the pumping axis vertical and the inlet opening upwards Lock the pump by adjusting the for leveling feet for resting solidly on the floor U...

Страница 39: ...ng screws from the flanging plate and the claw clamps 13 Unscrew the screws maintaining the plate on the clamping bar Remove the hoisting rings and disassemble the clamping bar Re install the hoisting...

Страница 40: ...e www adiden com Pump model Quantities liter Nber of can 0 4 L FB203 Roots housing Oil capa city gear side motor side A203H 0 35 0 35 x 1 A803H 0 35 0 45 0 25 1 05 x 3 A1503H 0 35 1 00 0 55 1 90 x 5 A...

Страница 41: ...ove the fill plug 7 Position the funnel equipped with flexible tube in the oil filler neck Fill the pump with oil according to the recommended quantities Do not exceed the indicated quantities The oil...

Страница 42: ...FB203 Remove the fill plug 4 Position the flexible tube in the oil fill neck Fill the pump with oil according to the recommended quantities The oil level should be in the middle of the sight glass 5 D...

Страница 43: ...connection Adaptator NPT BSPP 1 4 NPT 1 4 BSPP 1 4 NPT 1 4 BSPP OUT IN Water cooling quick connection Separately packaged The use of uncontrolled city water can lead to water circuit clogging due to...

Страница 44: ...adjusted according to the pump model see A 40 with the needle tap located on the flowmeter panel Note for A1503H and A1803H the flowmeter adjusts the water flow in the roots flanges blower only Water...

Страница 45: ...Pipe 6 35 mm OD 1 4 inch tubing supplied by the customer NITROGEN A sudden inrush of N2 into the pressurization circuit may result in damage to internal parts Close the pressure regulator by turning t...

Страница 46: ...e to the pump and must be easily accessible by the operator Electric shock hazard The voltages and currents in use can induce electric shock Isolate and lock out power line by switching off the main i...

Страница 47: ...el protection you must install on the main power supply a type B differential circuit breaker GFI or RCD of 300 mA This equipment protection device is compatible with type T T electrical network For o...

Страница 48: ...well as don t operate the product unless the inlet and exhaust are connected to a vacuum and exhaust pumping line Before using the monitoring check that the mechanical and electrical connections defi...

Страница 49: ...OOTS menu on ENABLED see C 43 Press on the ROOTS key until the word Roots disappears from the display Start up the pump by pressing START and stop it after few seconds if the pressure indicated is les...

Страница 50: ...prevent foreign bodies from entering the pump while waiting to be installed replace blanking plate on inlet and exhaust ports again Electric shock hazard on touching When the main isolator is switched...

Страница 51: ...ngerous Study the user manual before starting the pump Do not expose any part of the human body to vacuum The product is supplied with the inlet and exhaust sealed Remove these blanking plates when yo...

Страница 52: ...tand a negative pressure of 1 103 hPa with reference to the atmospheric pressure At the pump inlet To get the best pumping speed ensure that the vacuum line is the minimum length possible and has an i...

Страница 53: ...used to control automatic functions Male Sub D 50 pin connector Dry contact outputs are rated 30V 1 A max Overvoltage and overcurrent can cause internal electrical damages Monitor external contacts v...

Страница 54: ...Stop Purge Start Stop Standby purge Start Stop Inlet valve Open Close Valve control authorization In not used Out exhaust pressure warning Out purge warning Out motor temp warning Out pump fail Warnin...

Страница 55: ...o be activated when a DC voltage between 5 and 30V is applied Inputs can be used by pins 47 48 OV and pins 49 50 12V in order to be controlled by external contacts of the customer equipment Wiring cus...

Страница 56: ...tandby purge starts after a time set time programmed by RS232 see C 90 Contact open N2 standby purge stops This function is only valid when remote control mode is validated with contact S1 open and wh...

Страница 57: ...running valve opened no warning 2 3 Warning presence 4 5 Alarm presence Unit stoppage 6 7 Maintenance warning 8 9 Pump running correct purge and inlet valve opened 14 15 Pump running FB Roots running...

Страница 58: ...are rated 50V 1A The input is considered activated when the pins are linked Function 2 3 Contact opened emergency stop command is activated Function 1 4 This contact opens when emergency stop is activ...

Страница 59: ...2 Transmission speed 9600 bauds Data Length 8 bits Parity NO Stop bit 1 The connections are located on the electrical rear panel of pump 1 2 3 4 5 GND Ground V RS485 TD Transmission Data RS 232 Recept...

Страница 60: ...ll only be lost on the pump that is disconnected 9 8 9 8 J6 9 8 9 8 J7 J6 9 8 7 6 9 8 J7 RS 485 communication box 5 4 3 2 1 9 pin male DB Conn J6 9 pin female DB Conn J7 V V 9 pin male DB Conn J6 9 8...

Страница 61: ...C 042 M4 monitoring system function table C 043 Use of the M4 monitoring system for pumping operation C 044 Saving and loading of pump configuration with HHR C 045 M4 monitoring setting for transport...

Страница 62: ...ocess chamber flush the pump using a dry inert gas such as Nitrogen through the inlet port during 30 minutes Stop inert gas supply and let the pump running at ultimate pressure for 5 minutes Stop the...

Страница 63: ...gnition when Si dust produced in anaerobic conditions is violently put in contact with O2 is also possible Overpressure generated by this kind of mix explosion detonation is 10 to 11 times initial pre...

Страница 64: ...nlet N2 purge Be sure pump is purged with N2 Air is prohibited This purge needs to be maintained at any time to avoid air back streaming likely to enter in contact with flammable deposits This purge c...

Страница 65: ...the differential pressure is too high meaning that only a soft pumping valve can be used to evacuate the chamber from atmosphere To use an efficient flow restriction i e soft pumping for chamber evac...

Страница 66: ...emote HHR remote controlled by the equipment remote control connector remote controlled by serial link RS232 connector Two switches have to be configurated the first at the back of HHR near the cable...

Страница 67: ...installed either alone or in a group of pumps The pump is remote controlled by the commands transmitted on the serial link refer to B 110 for wiring and C 90 for commands Pump control mode How enable...

Страница 68: ...open Pump will still be running At the end of the warning time t 2mn The red leds on the HHR and in front of the pump will turn on The purge alarm message D13 is displayed on the HHR The pump buzzer w...

Страница 69: ...ameter of the Auto start from Disabled to Enabled with the HHR perform the following operations Connect the HHR plug to the HHR connector on the front or rear panel Set the Auto start parameter in the...

Страница 70: ...rs the power consumed by the machine by generating a warning followed by an alarm as soon as the power is greater than each of its thresholds the pump is immediately stopped when alarm threshold is ex...

Страница 71: ...ng system M4 monitoring system function table Use of the M4 monitoring system for pumping operation Saving and loading of pump configuration with M4 M4 monitoring setting for transport C 41 C 41 C 42...

Страница 72: ...dation key Means that the hand held remote is controlling the pump when a star appears on the display Parameter setting mode access key Press to access the parameter setting mode Press to exit the var...

Страница 73: ...red in the factory according to the options and accessories defined during the order This configuration allows the pump to run C 43 If parameters have to be customized by the user it is necessary to g...

Страница 74: ...th key or Validate with ENTER key Update the needed parameters an validate Return to the main menu by pressing SET successively Reset the clock at the initial start up To ensure correct fault monitori...

Страница 75: ...acement or for new pump installation C 44 Menu Description DEFINITION MENU To configure the pump model functionnal options and external sensor management SETTING To adjust the monitoring parameters MA...

Страница 76: ...UTO START ENABLED DISABLED Allows the pump to restart automatically after a power cut irrespective of the duration DISABLED ROOTS CMD ENABLED DISABLED Allows separate control of the Roots START STOP c...

Страница 77: ...4000 mV ALARM time 4000 to 9950 mV 8000 mV LOG1 SENSOR 4 WARNING time 0 to 60 mn DISABLED DISABLED ALARM time 0 to 60 mn DISABLED DISABLED LOG3 SENSOR 4 WARNING time 0 to 60 mn DISABLED DISABLED ALARM...

Страница 78: ...IAL N ROOTS SERIAL N OTP DISP VERSION FLASH DISP VERSION STORAGE ENABLED DISABLED DISABLED CONFIG SAVE Save a pump configuration in the HHR memory CONFIG LOAD Allows to record the configuration from H...

Страница 79: ...e Roots while the FB203 is running set the CMD ROOTS menu on ENABLED The Roots will start or stop by pressing the ROOTS key When the Roots is running the word ROOTS is displayed on the HHR Check the d...

Страница 80: ...ps are equipped with an exhaust pressure monitoring sensor It is the responsibility of the user to prevent the risks related to excess overpressure 52H LOC N2 ROOTS FB POWER 1180 W PRESSURE 940 mbar F...

Страница 81: ...rolonged of the SETTING menu has been programmed 0 to 120 min C 42 This additional N2 injection is activated after each pump stop whatever may be the origin either a stop command coming from the tool...

Страница 82: ...ol Press CONTROL key check the presence of the star and the letter X alternavely on the left corner of the screen showing that the control has been taken When the pump has been configurated for automa...

Страница 83: ...ENTER Go on using to access the CONFIG SAVE menu and valid by ENTER The following screen appears Validate with ENTER button The pump configuration is then duplicate into the HHR memory Return to main...

Страница 84: ...NFIG LOAD menu from MANAGEMENT menu The former configuration is automatically reset All pump parameters are loaded remotely except the options which have to be locally configurated according to the pu...

Страница 85: ...The pump start up is now not possible second counter is blocked Note At switching on STORAGE mode is automatically deleted Date and Time reset is only necessary operating mode blocked during storage...

Страница 86: ...elow Depending on the process it is not necessary to cool the Roots In this case invert the valve opening position from a half turn and adjust the threshold according to the table below Roots cooling...

Страница 87: ...s displayed on the hand held remote control but the state of output contacts don t change on the remote control connector Two cases can arise If the pump is running when the failure occurs it will res...

Страница 88: ...HHR STOP button is pressed or if the pump is stopped due to an alarm the valve is closed and the pump stops as soon as the valve end stop sensor is triggered or after 3 seconds If the HHR START butto...

Страница 89: ...w contact J14 S1 and J14 S7 must be open B 70 The valve closes if contact J14 S6 controlled by the customer s equipment is closed B 70 The valve opens if contact J14 S6 controlled by the customer s eq...

Страница 90: ...In the A3H pump behind the left cover Press to step across the list headings Press to step down the parameters within a particular list You will eventually return to the list heading Press to view th...

Страница 91: ...et point 120 2FSH 140 C Depending on the customer configuration the temperature set point can be configured from 0 C to 120 C When temperature set point is defined alarm must be adjusted arround the s...

Страница 92: ...G 04796 Edition 01 August 12 3 4 C 80 Use the bellows heater To hide reveal and promote parameters adixen Vacuum Products A3H Series Operating instructions...

Страница 93: ...Access code for calibration 0 oP CYCH Heat cycle time 1 ACCS InSt Unit Display units centigrade C dEC P Decimal places in display nnnn Ctrl Control type Pid Act Control action Reverse normal action f...

Страница 94: ...nfiguration of the serial link is as follows Type RS 232 ECHO ENABLED Transmission SPEED 9600 bauds Parity NO 2 Stop bits DISABLED Address 0 Setting Observations Action Observations Display Observatio...

Страница 95: ...ROO ON R 000 ERR2 The control ADDress of unit varies from 000 to 999 Message end character ASCII code 13 The character LF is not taken account by the unit The response Heading character A D D O R D P...

Страница 96: ...Nitrogen 04 E1 Logic input 05 E2 Logic input 06 Purge flow prolonged 07 FB maintenance 08 Reserved 09 Reserved 10 Reserved 11 Reserved 12 Reserved 13 Reserved MFS alert 14 Date setting Day 15 Date se...

Страница 97: ...4 separator character 5 FB status 6 Roots status 7 purge status 8 stand by 9 water valve 10 inlet valve 11 authorization valve closed 12 FB water valve 13 Roots water valve 14 reserved 15 monitoring m...

Страница 98: ...000STA CR Response 000 00000 2 0080 2530 0127 1230 0000000000 CR Only commands requiring the separator character are affected by the SEP order Example Modifying the header character Order Paramater R...

Страница 99: ...link OK or a specific response to the order if everything is correct ERR0 setting fault ERR1 order fault ERR2 parameter fault ERR3 context fault ERR4 checksum fault Note The Remote control mode has pr...

Страница 100: ...to maintenance D 010 First level of maintenance D 030 Diagnosis and troubleshooting D 400 Pump or Roots does not start D 500 The pump is running and then is showing a warning or fault message D 600 T...

Страница 101: ...ore starting work Located on the covers of the pump this label warns the user against possible risk of injury due to any hand contact with hot surfaces It states that protective gloves should be used...

Страница 102: ...control disconnect the J14 and J1 connectors at the rear of the electronic cabinet and connect the cover plug to it supplied with the machine Adjust the parameter PURGE FLOW PROLONGED for a period of...

Страница 103: ...xen Vacuum Products original spare parts delivered by adixen Vacuum Products containing i e all its components and sub assemblies This obligation will not cover the shipping cost to an adixen Vacuum P...

Страница 104: ...the hand held remote control a message via the RS 232 or RS 485 link on a micro computer Depending on the maintenance parameter programmed when the operating time before maintenance has expired the s...

Страница 105: ...al components electrical cabinet CB1 Transformer protection RT3 Protection CB3 Electronic protection CB2 Electrotechnic protection WATT BF203 power measurement TR1 I1 Main switch RT1 BF203 protection...

Страница 106: ...Voltage RT1 RT2 RT3 A203H LV 200 to 230 V 50 60 Hz 16 A HV 380 to 460 V 50 60 Hz 13 A A803H LV 200 to 230 V 50 60 Hz 16 A 10 A 1 A HV 380 to 460 V 50 60 Hz 13 A 6 A 0 7 A A1503H A1803H LV 200 to 230...

Страница 107: ...tby valve Water valve Water flow Motor temp Massflow sensor AUX temp Purge valve ADP Temp Check Press Ana input Inlet valve R P Therm ROOTS Therm ADP LI4 NC PT100 LI1 LI3 LL pump LI2 1 NC not used LO1...

Страница 108: ...cator does not switch on Hand held remote control display is not lighting up Display is showing a message or an alarm The pump is running and a message numbered is showing The pump is running but the...

Страница 109: ...e of cover plug J1 or check its locking Unit emergency stop engaged Rotate to unlock the emergency stop on the front panel display CB1 breaker switched off Switch it on D10 CB2 breaker switched off Sw...

Страница 110: ...the display Other problem Call customer service center HHR is showing Pump in storage mode Set the main switch to 0 to switch off the pump Switch it on again HHR is showing In Remote mode no cover plu...

Страница 111: ...NPUT opt opt 05 LOGIC INPUT 1 2 X X 07 SPEED CONTROL X 08 WATER FLOW 3 X X 09 POWER SUPPLY 3 X X 10 FB MOTOR TEMP 3 opt 11 INLET VALVE 3 opt opt 12 LOGIC INPUT 3 2 X X 13 PURGE 4 X X 15 T HIGH HP FB 5...

Страница 112: ...tation direction Check the direction of rotation of the pump B51 Incorrect threshold setting power value set alarm Check the settings of monitoring thresholds Other problem Call customer service cente...

Страница 113: ...al speed Mechanical problem Check the frequency converter Check the sensor connection on the LI4 connector see D10 Other problem Call customer service center Warning message No water flow Check the wa...

Страница 114: ...ther problem Call customer service center Warning message There is an isolating valve at inlet The valve does not close at pump stop or does not open at start up Check that INLET VALVE OPTION is ENABL...

Страница 115: ...g problem Refer to warning W08 WATER FLOW Defective control valve Call customer service center Other problem Call customer service center Warning message Pump temperature is Set temp 15 C Temperature...

Страница 116: ...vice center Alarme message Memory failure of the electronic M4 Call customer service center Alarme message Positioning error of the coding wheel S2 Check S2 coding wheel at the rear of the monitoring...

Страница 117: ...ed Check CB2 D10 Connect the EMO cover plug B100 Check that there is a strap between pins 2 and 3 of the EMO B100 Check motor temperature sensor on FB203 Other problem Call customer service center War...

Страница 118: ...FB203 maintenance Call customer service center Mechanical noise Damaged ball bearing FB203 maintenance Call customer service center Rotors seizing FB203 maintenance Call customer service center Unsyn...

Страница 119: ...fety instructions for pump relocation E 012 Draining of the water cooling circuit E 013 Saving and loading of the pump configuration E 014 Disconnecting the pump from the installation E 015 Conditioni...

Страница 120: ...order Safety instructions for pump relocation Draining of the water cooling circuit Saving and loading of the pump configuration Disconnecting the pump from the installation Conditioning the pump for...

Страница 121: ...re pressurized hazardous energies Release pressure before servicing for the N2 purge disconnect the gas line quick connector and turn off the pressure regulator by turning the knob counter clockwise f...

Страница 122: ...epartment for instructions according to the local regulations Users are advised Protection against corrosive gases Stop the pump according to Shutdown procedure for discontinuous operation safety inst...

Страница 123: ...on OUT and place the other end in a vessel total water volume will be greater than one liter Connect one end of pipe A at location of IN and connect the other end to a compressed air circuit 2 to 5 10...

Страница 124: ...ion is memorized in the internal electronics of M4 monitoring Enter in the menu by SET Go on using to access the MANAGEMENT menu and valid by ENTER Go on using to access the CONFIG SAVE menu and valid...

Страница 125: ...nect the water inlet and outlet quick connectors Disconnect the N2 purge connector Disconnect the pump from the inlet piping and fit a blanking plate on the inlet Disconnect the secondary exhaust port...

Страница 126: ...068197 Equipped centering ring 068230 Releasable clamp 303002 You must have a supply of dry nitrogen to pressurize the pump B 40 for the dry nitrogen s characteristics Block the inlet port with the fl...

Страница 127: ...the clamping bar Re install the hoisting rings and screw them Install the flanging plate position the assembling screws on the clamping bar without blocking them 13 Position the flanging plate on the...

Страница 128: ...o access to the choosen menu Validate with the ENTER key The fresh screen appears Use the keys to increase the maintenance duration time Validate with the ENTER key Return to the main menu and exit th...

Страница 129: ...01 August 12 1 1 Maintenance components Operating instructions A3H Series F F 000 Spare parts Instructions of use F 010 Delivered accessories spare parts adixen Vacuum Products A3H Series Operating in...

Страница 130: ...genuine jeopardizes the initial safety conditions of the equipment In such cases the EC declaration of conformity becomes null The manufacturer withdraws responsibility for such operations Besides co...

Страница 131: ...trogen quick connector 107142 A113 oil 2 5L 064659 A113 oil 0 5L 064657 Part number Equipment A203H A803H A1503H A1803H 1 4 stainless steel 076720 out 076721 in 3 8 stainless steel 115509 out 115510 i...

Страница 132: ...ugust 12 1 1 Appendix Operating instructions A3H Series G G 100 Declaration of conformity G 110 A3H Series Electrical schematic G 200 Declaration of contamination adixen Vacuum Products A3H Series Ope...

Страница 133: ...G 03922 Edition 02 August 12 1 1 G 100 adixen Vacuum Products A3H Series Operating instructions...

Страница 134: ...4 13 50 50 53 1 2 3 4 63 62 61 60 P2 COMMAND 7 8 12 11 9 10 TB1 1 3 5 1 2 3 MAIN OPTION MAIN PLUG TR1 CB2 J1 EMO 2 1 PURPLE GREY PURPLE 51 52 4 1 2 3 66 66 52 5 6 7 8 64 65 13 14 P5 P SUPPLY RS 232 48...

Страница 135: ...dard 1 Large Volume 2 A803H Standard 1 3 Large Volume 2 5 A1503H Standard 1 6 A1503H Harp 2 7 A1803H Standard 1 8 Large Volume 2 9 Figures refer to wiring diagrams available in next pages To identify...

Страница 136: ...1 1 2 3 4 12 11 11 12 J131 Display panel white green yellow brown white white brown Alarm Alert 100 C Alarm 150 C Motor Temp M4 MOTOR Low voltage version High voltage version FB203 without frequency c...

Страница 137: ...H1 H2 HC H1 H2 FILTER FILTER Common OUT IN Default OUT white green yellow brown white brown Alarm alert 100 C alarm 150 C MOTOR TEMP M4 MOTOR TEMP M4 MOTOR MOTOR alert 100 C alarm 150 C white green ye...

Страница 138: ...S5 P2 GND ON VAR Common OUT OUT HC H1 H2 alarm 150 C alarm 120 C alert 100 C alarm 150 C alarm 120 C alert 100 C alarm alarm FILTER FILTER alarm 150 C alarm 120 C alert 100 C IN Default IN Default IN...

Страница 139: ...ANA INPUT 3P1 1P2 2P1 3P2 2P2 1P1 HC H1 H2 HC H1 H2 MOTOR MOTOR FILTER IN Default IN multispeed ref 1 OUT frequency detection alarm alarm alarm 150 C alarm 120 C alert 100 C FILTER IN Default IN mult...

Страница 140: ...V W R S T MA MC AM AC PC SC S3 S1 S5 P2 GND ON VAR Common OUT OUT PE L2 L3 L1 PE L 2 L 3 L 1 0V 13 14 RSV1803 LI4 RP 0V 7 8 3 6 5 4 alarme HC H1 H2 HC H1 H2 alarm LV alarm alarm 120 C MOTOR FILTER FI...

Страница 141: ...V W R S T MA MC AM AC PC SC S3 S1 S5 P2 GND ON VAR Common OUT OUT PE L2 L3 L1 PE L 2 L 3 L 1 0V 7 8 3 6 5 4 ANA INPUT RSV1803 HC H1 H2 HC H1 H2 alarm alarm 120 C FILTER MOTOR MOTOR FILTER alarm alarm...

Страница 142: ...e used if toxic or copper gases have been pumped The risk may be of the following nature Chemical Danger to health risks of explosion fire risks for the environment Please indicate the chemical formul...

Страница 143: ...2 2 G 200 GB 00956 Edition 10 August 12 adixen Vacuum Products A3H Series Operating instructions...

Страница 144: ...ovative and custom vacuum Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide for technological perfection competent advice solutions worldwide for technological perfection com...

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Pfeiffer Vacuum Adixen A1503H, Руководство по эксплуатации

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