G 03890 - Edition 04 - Aout 12
1/1
B 40
Inert gas purge connection
(N
2
connection)
Nitrogen
characteristics
For maximum performances,
a filtered dry nitrogen supply
with
the following characteristics is required:
H
2
O concentration < 10 ppb
O
2
concentration < 5 ppb
Dust < 1
μ
m
Oil < 0.1 ppm
Pressure between
2 - 6 · 10
3
hPa (29 to 87 psi) (relative pressure)
Maximum flowrate: 120 slm
Connection
4 mm
6 mm
1/8 NPT
1/8 NPT
Pipe 6.35 mm OD
1/4 inch tubing
(supplied by
the customer)
NITROGEN
A sudden inrush of N
2
into the pressurization circuit may result in damage
to internal parts. Close the pressure regulator by turning the knob counter-
clockwise before pressurizing the circuit.
The N
2
flowrate can be
adjusted with the pressure
regulator according to the
process (see
A 40
).
A mass flowmeter, located
behind the front panel, allows
flow reading on the hand-held
remote module.
N
2
flowrate
adjustment
Pressure regulator
Flowmeter panel
Manometer
Separately packaged
adixen Vacuum Products - A3H Series Operating instructions
