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E 11
Safety instructions for pump relocation
G 03529 - Edition 03 - August 12
Continue by Draining of the water cooling circuit ...............
E 12
E 12
Remaining process gases in the pump may cause severe injury or death.
Before removing the pump, continue N2 flow from the process tool
for 30 min. Nitrogen pressure and flow rate should be identical to the
programmed values during process.
During pump removal, operator could be in contact with process
residues on the exhaust which could cause severe injury or death.
Ask your safety department for instructions according to the local
regulations.
Users are advised:
Protection against
corrosive gases
Stop the pump according to «Shutdown procedure for discontinuous
operation» safety instructions, see C00.
Wear gloves, protective glasses, any appropriated safety equipment,
Ventilate the premises well,
Do not eliminate maintenance waste via standard disposal channels.
Have it destroyed by a qualified company if necessary,
Install the inlet and exhaust blanking plates, thus delivered with the
pump or available as accessories (refer to E15) .
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Chemical supplies coming from the tool, as well as the water and the
nitrogen need also to be locked out/tagged out.
adixen Vacuum Products - A3H Series Operating instructions