PRECESSION ELEPHANT 2 Scan Head 2
No. Label / description
Action
⑮
N
2
OBJECTIVE
Purge gas inlet for objective;
Purge gas: pressurized air (2:4:0 according to
ISO 8573-1:2010) or nitrogen gas
(N
2
4.0, oil- and particle-free);
Inlet pressure: max. 50 mbar (5 kPa);
Volume flow: typ. 2 l/min;
Recommend tubing material:
polyetherurethane; D 4 mm, d 2.5 mm
(or D 4 mm, d 2 mm)
Internal restrictor limits pressure to
1 bar (100 kPa);
Connect with tube to purge
gas supply; see also section
⑯
N
2
HEAD
Purge gas inlet for scan head;
Purge gas quality: pressurized air (2:4:0
according to ISO 8573-1:2010) or nitrogen
gas (N
2
4.0, oil- and particle-free);
Inlet pressure: max. 50 mbar (5 kPa);
Volume flow: typ. 2 l/min;
Recommend tubing material:
polyetherurethane; D 4 mm, d 2.5 mm
(or D 4 mm, d 2 mm)
Internal restrictor limits pressure to
1 bar (100 kPa);
Internal pressure relief valve opens at
140 ± 50 mbar (14 ± 5 kPa);
Connect with tube to purge
gas supply; see also section
⑰
Beam exit and
suction cup inlet
None
⑱
Suction cup outlet;
tube D 10 mm
If a suction cup is present then
connect it to an extraction unit;
see also section
on page
24