
authorized
replacement
parts
(Reference
Section
4.4
–
Recommended
Replacement
Parts).
1.
Turn
OFF
the
SMU,
disconnect
power,
and
ensure
pressure
in
the
chamber
and
jacket
is
at
0
psig.
2.
Open
chamber
door
and
carefully
remove
the
old
door
gasket.
Be
sure
not
to
nick
or
cut
the
gasket
or
scratch
the
groove
in
the
aluminum
door.
3.
Inspect
the
gasket
groove
to
ensure
that
it
is
clean
and
smooth.
4.
Install
a
new
gasket
(Reference
Section
4.4
–
Recommended
Replacement
Parts)
by
aligning
the
gasket
with
the
door
groove
and
pushing
it
into
place
with
your
fingers
at
four
equidistant
locations
around
the
groove
(e.g.,
12,
3,
6,
and
9
o’clock).
Soap
and
water
will
ease
the
installation.
Carefully
work
the
gasket
into
the
groove
until
it
is
evenly
distributed
around
the
door.
Working
from
one
point
only
will
result
in
too
much
or
too
little
gasket
left
over
at
the
other
side
of
the
door.
Wipe
the
gasket
and
the
mating
face
on
the
chamber
door
frame
to
ensure
that
no
debris
could
cause
a
leak
path.
4.3.9
Replacing
the
Chamber
Doorpost
O
‐
Ring
NOTE:
The
O
‐
ring
under
the
doorpost
should
be
replaced
whenever
a
leak
is
detected
at
the
doorpost
or
when
the
doorpost
is
refitted.
The
O
‐
ring
material
is
EPDM.
Do
not
use
Buna
‐
N
or
silicone
doorpost
O
‐
rings
due
to
inferior
resistance
to
steam
.
Contact
FDI
for
replacement
parts
(Reference
Section
4.4
‐
Recommended
Replacement
Parts).
1.
Turn
OFF
the
SMU,
disconnect
power,
and
ensure
pressure
in
the
chamber
and
jacket
is
at
0
psig.
2.
Open
the
chamber
door
and
remove
the
handwheel
retainer
(large
washer)
on
the
outboard
end
of
the
doorpost.
3.
Remove
the
six
radial
arm
wire
retainers.
4.
Rotate
the
handwheel
assembly
until
the
entire
assembly
unscrews
from
the
doorpost.
5.
Remove
the
three
doorpost
screws
on
the
inside
of
the
door
and
carefully
tap
out
the
doorpost
using
a
soft
mallet.
6.
Remove
the
old
doorpost
O
‐
ring
and
clean
the
O
‐
ring
groove
on
the
door
and
the
O
‐
ring
seating
area
on
the
doorpost.
7.
Lightly
lubricate
the
new
doorpost
O
‐
ring
with
grease
and
install
on
the
doorpost.
8.
Insert
the
doorpost
into
the
door
and
insert
the
three
bolts.
Lightly
tighten
the
doorpost
against
the
door.
9.
Clean
and
re
‐
grease
the
doorpost
threads
with
a
high
‐
temperature
(275°F)
NLGI
#2
grease.
10.
Ensuring
that
the
hole
in
the
hub
flange
lines
up
with
the
peg
in
the
door,
install
and
screw
on
the
handwheel
assembly.
Reinstall
the
six
radial
arm
wire
retainers.
11.
Firmly
tighten
the
handwheel
assembly
against
the
door
to
draw
the
back
of
the
doorpost
against
the
door.
12.
Tighten
the
three
bolts
on
the
back
of
the
door
to
90
‐
inch
‐
lb
of
torque.
WARNING
:
The
threads
in
the
door
are
aluminum.
Do
not
over
‐
torque.
88
Содержание P2131
Страница 121: ... THIS PAGE INTENTIONALLY LEFT BLANK 115 ...
Страница 130: ...SECTION A APPENDIX 124 ...
Страница 131: ...A 1 Swagelok Fitting Installation Instructions 125 ...
Страница 135: ...A 2 PLC Data Sheet 129 ...
Страница 141: ...A 3 VERIFY Product Information 135 ...
Страница 147: ...A 4 WRS Pump Information 141 ...
Страница 158: ...A 5 Vacuum Leak Test Troubleshooting Guide 152 ...